Work

Global Geometry-Based Drum-Concave Triangular Fractal Nanoscale Metamaterial

Year: 2026
Type: article
Abstract: Based on the independently proposed global geometry unification principle, this paper presents a China original technical solution for 3nm/2nm advanced process chips. Its core structure is a bulge-concave triangular fractal lattice metamaterial integrating multiscale heat dissipation, low dielectric signal isolation, and micro-nano sensing functions. To bypass the EUV lithography bottleneck, this paper innovatively designs a biomimetic composite 3D printing system that utilizes the micro-nano precision characteristics of natural organisms to achieve error free fabrication of 3–10 nm lattice structures. This paper also develops a dedicated geometric symbol script that enables one click quantitative calculation and significantly reduces R and D cost and cycle. This solution provides a feasible path for China’s semiconductor industry to break through both material and process bottlenecks and realize independent and controllable advanced chip technology. At the fundamental level, this solution follows the constraint-release dual-cycle energy transport principle, forming a complete theoretical closed loop from micro-nano structure to global geometry.
Author: Xiang, Kaili
Language: English
Open Access status: green
OpenAlex ID: W7150868876
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