Year: 2026
Type: article
Abstract: A multi-mode interferometer (MMI) spectrometer is a type of reconstructive micro-spectrometer based on imaging light propagation patterns in MMI waveguides. A waveguide scattering surface accentuates imaging light patterns in the multi-mode interferometer. This technology has been proven with an SU-8 core waveguide with an etched SU-8 nanograss scattering surface. This paper describes our creation of a fully silicon-based spectrometer using a silica core MMI waveguide. Scattering features were created in silica using SU-8 nanograss as an etch mask in a reactive ion etch (RIE). With optimized etch parameters, the silica core MMI spectrometer achieved an SNR of three with an incident light power of -68 dBm, which was almost 6 dB lower than designs with an SU-8 core.
Source: Micromachines
DOI: 10.3390/mi17040453
Language: English
Topic: Photonic and Optical Devices
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: gold
Estimated APC paid: $2,534
Funder: National Science Foundation
OpenAlex ID: W7151282759