Work

High-Q Shear Mode ZnO-based Film Bulk Acoustic Resonators with Air Cavity for Liquid-Phase Sensing Applications

Year: 2026

Type: article

Source: Semiconductors

DOI: 10.1134/s1063782625604522

Authors: Aditya Pratap Singh Takuli, Raju Patel, Tanmoy Majumder, Manoj Singh Adhikari, Deepak Bansal

Institutions: Vellore Institute of Technology University, Graphic Era Hill University, Central Electronics Engineering Research Institute

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7154144789

FWCI: 1.789

Cites: 32

Cited by: 1

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