UV ozone oxidized high- k TaO x dielectric with van der Waals interface for two-dimensional electronic devices
Year: 2026
Type: article
Source: Applied Physics Letters
DOI: 10.1063/5.0321761
Authors: Tong Tong, Yuan Gao, Yinfeng Long, Kan Liao, Han Chen, Long Lin, Xiang Lan, Linghai Zhang, Lin Wang, Yucheng Jiang, Weisheng Li
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W7154271480
