Work

Atomic force microscopy (AFM) tip metrology and inspection by knife edge diffractometry

Year: 2026

Type: article

Source: Review of Scientific Instruments

DOI: 10.1063/5.0309841

Authors: Kuan Lu, Pengfei Lin, Hyeonho Cho, Sunghan Kim, Jiyong Park, ChaBum Lee

Institutions: Texas A&M University, Chung-Ang University, Korea University of Science and Technology, Korea Institute of Industrial Technology

Language: English

Topic: Force Microscopy Techniques and Applications

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

Funders: Korea Institute of Industrial Technology, National Research Foundation of Korea

Awards: G3098998051, G676611572

OpenAlex ID: W7154279021

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Cites: 18

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