Work

An Approach of Piezoelectric-Assisted Chemical Mechanical Polishing Using BaTiO 3 Abrasives and Hydrogen Peroxide

Year: 2026

Type: article

Source: ACS Applied Nano Materials

DOI: 10.1021/acsanm.6c00206

Authors: Qingjie Yang, Qirong Zhu, Xueting Liu, Qingxiu Yang, Mingzhe Li, Siwen Yu, Jianjun Guo, Dingyi Tong, Aihua Sun, Yuchuan Cheng

Institutions: Ningbo University, Chinese Academy of Sciences, Ningbo Institute of Industrial Technology, Hangzhou Dianzi University

Language: English

Topic: Advanced Surface Polishing Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Responsible consumption and production

Open Access status: closed

Funders: National Natural Science Foundation of China, China Postdoctoral Science Foundation, Hangzhou Dianzi University, Natural Science Foundation of Ningbo

Awards: G2552523452, G3340883252, G361399432, G3741844793, G5253147233

OpenAlex ID: W7154455722

FWCI:

Cites: 32

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