Work

Development of High Fracture Toughness MEMS Microphone Using Pd‐Based Metallic Glass Membrane

Year: 2026

Type: article

Source: Electronics and Communications in Japan

DOI: 10.1002/ecj.70031

Authors: Naokatsu Ikegami, Kentarou Shiraishi, Hiroshi Takahashi, Takahide Usui, You Kubota, Ichiro Kashiwagi

Institution: Nisshinbo Micro Devices Inc. (Japan)

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7155038407

FWCI:

Cites: 30

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