Work

Impedance‐Matched High‐Overtone Thickness‐Shear Bulk Acoustic Resonators With Scalable Mode Volume

Year: 2026

Type: article

Abstract: ABSTRACT High‐overtone bulk acoustic resonators (HBARs) are widely used in microwave signal processing due to their high quality factors and multimode resonances. However, conventional HBARs often suffer from impedance mismatch at metal interfaces, spurious modes, and limited flexibility in resonant mode volume design. Here we demonstrate a laterally excited high‐overtone thickness‐shear bulk acoustic resonator (X‐HTBAR) based on a 3 µm 128° Y‐cut LiNbO 3 film on a high‐resistivity Si substrate, enabling excitation of thickness‐shear modes without a bottom electrode. The planar electrode configuration confines elastic energy within the electrode gap region and provides stable free spectral ranges. Experiments show comb‐like phonon spectra from 0.1–1.8 GHz with quality factors of 10 3 –10 5 and frequency–quality products exceeding 10 1 3 . Gridded electrodes suppress spurious modes, while the strong electromechanical coupling of 128° Y‐cut LiNbO 3 enables tunable resonant mode volumes (0.008–0.064 mm 3 ). These results demonstrate an alternative architecture for multimode acoustic resonators with potential applications in microwave and electro‐acoustic systems.

Source: Advanced Science

DOI: 10.1002/advs.75456