Molybdenum Ion-Induced Adhesion of Colloidal Silica to Polyvinyl Acetal Brushes in Post-Chemical Mechanical Planarization Applications: Experiments and Multiscale Simulations
Year: 2026
Type: article
Institutions: Hanyang University, Samsung Electronics (South Korea)
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funders: Hanyang University, Samsung
Awards: G5197755152, G7830977169
OpenAlex ID: W7158854530