Thermally Stable Si3N4 Photonic Circuits Enabled by TiO2 Overlays and dn/dT Measurements
Year: 2026
Type: conference-paper
Language: English
Topic: Photonic and Optical Devices
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W7159912075
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