Work

Integrated feature-scale simulation framework for atomic layer deposition incorporating transient transport and kinetics

Year: 2026

Type: article

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/6.0005424

Authors: Yeong Geun Yook, Ji Ho Cho

Institution: Korea Institute of Fusion Energy

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Research Council of Science and Technology

Award: G75951965

OpenAlex ID: W7160160185

FWCI: 1.766

Cites: 27

Cited by: 1

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