Work

Grayscale Multiple Exposure Method of Digital Projection Lithography for High‐Fidelity Fabrication of Dense Metasurface in Infrared Region

Year: 2026

Type: article

Source: Laser & Photonics Review

DOI: 10.1002/lpor.71270

Authors: Xiao‐Wen Huang, Jing Zhou, Yuan‐Yuan Zhao, Jing‐Tao Chen, Xuan‐Ming Duan

Institution: Jinan University

Language: English

Topic: Metamaterials and Metasurfaces Applications

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, Basic and Applied Basic Research Foundation of Guangdong Province

Awards: G1837176450, G6149773900, G7466243926

OpenAlex ID: W7160617990

FWCI: 1.028

Cites: 26

Cited by: 1

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