A transmission grating extreme ultraviolet spectrometer using a gradient-reflectivity Al/Zr multilayer mirror for the range of 24–32 nm
Year: 2026
Type: article
Source: Review of Scientific Instruments
DOI: 10.1063/5.0317163
Language: English
Subfield: Surfaces, Coatings and Films
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
Award: G7358230744
OpenAlex ID: W7160618038