Layer-specific porosity analysis in sub-nanoporous silica thin films using variable-energy positron annihilation lifetime technique, ellipsometric porosimetry, and attenuated total reflection infrared spectroscopy
Year: 2026
Type: article
Source: Review of Scientific Instruments
DOI: 10.1063/5.0294598
Authors: Shigeru Yoshimoto, Kenji Ito
Language: English
Subfield: Mechanics of Materials
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W7160652783
