Cryogenic temperature sensing characteristics of surface acoustic wave resonator with high Q based on AlScN film
Year: 2026
Type: article
Source: Journal of Applied Physics
DOI: 10.1063/5.0312339
Institutions: Shanghai University, ShanghaiTech University
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Award: G7955766417
OpenAlex ID: W7160853802