Work

RF CCP source operable in the sub-mTorr regime

Year: 2026

Type: article

Source: Physics of Plasmas

DOI: 10.1063/5.0324289

Authors: Woo-been Lee, Si-jun Kim, Chul-hee Cho, In-ho Seong, Won-nyoung Jeong, Ba-da Lee, Yun-hyung Kim, Shin-jae You

Institutions: Chungnam National University, Centre National de la Recherche Scientifique, École Polytechnique, Sorbonne Université, Institut Polytechnique de Paris, Laboratoire de Physique des Plasmas

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Ministry of Trade, Industry and Energy, Korea Institute of Machinery and Materials, National Research Foundation of Korea, Ministry of SMEs and Startups, Ministry of Science and ICT, South Korea

Awards: G1471385297, G1532178269, G2252192471, G2252197380, G3181406793, G3382873401, G3517066329, G3990422478, G5514307620, G5707794955, G6326545964, G6612218925, G7202137034, G7289611234, G7460424352, G7546741497, G7717535935, G7743501972

OpenAlex ID: W7160859599

FWCI:

Cites: 19

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