Work

Performance of TiAlN multilayer coatings prepared by hybrid multi-arc ion plating and high-power impulse magnetron sputtering

Year: 2026

Type: article

Source: Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

DOI: 10.1116/6.0005359

Authors: Leilei Chen, Ziran Feng, Yu Gong, Hao Zhang, Xingjian Che

Institutions: China Yangtze Power Co., Ltd. (China), Wuhan Research Institute of Materials Protection

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: China Yangtze Power

OpenAlex ID: W7161590652

FWCI:

Cites: 26

Cited by:

Related to: