Work

Two-photon states meet polarization-gradient metasurfaces for nanometric, low-dose lateral-displacement metrology

Year: 2026

Type: article

Abstract: Accurate displacement sensing is indispensable in advanced semiconductor lithography. Conventional coherent-light-based approaches are hindered by photon budget limitations, slowing down in-situ measurements. In a recent study, Chen et al. introduced a polarization-gradient metasurface integrated with two-photon quantum interference to achieve equivalent precision with only ~3% of the photons required by classical methods. This work represents a decisive step in merging metasurfaces with quantum resources, paving the way for high-speed, low-noise, and integration-ready displacement metrology.

Source: Light Science & Applications

DOI: 10.1038/s41377-026-02223-7

Authors: Qian-Mei Deng, Jun-Hao Zeng, Feng-Jun Li, Zi-Lan Deng

Institution: Jinan University

Language: English

Topic: Metamaterials and Metasurfaces Applications

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: gold

Estimated APC paid: $4,190

OpenAlex ID: W7161962431