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A dual-mode X-ray Diffraction Metrology System with Parallel and Convergent-beam capabilities

Year: 2026

Type: conference-paper

Source: China Semiconductor Technology International Conference (CSTIC)

DOI: 10.1109/cstic68613.2026.11537459

Authors: Yankun Sun, Yinqiao Feng, Jie Kang, Yuxiang Huang, Trina Wong, Zhuo Li, Feng Hong, Athena Chang

Language: English

Topic: X-ray Diffraction in Crystallography

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7163165676

FWCI:

Cites: 4

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Related to: 10