Work

Atomistic-to-reactor digital twin for silicon nitride atomic layer deposition via bidirectional kinetic Monte Carlo-computational fluid dynamics coupling

Year: 2026

Type: article

Source: Chemical Engineering Journal

DOI: 10.1016/j.cej.2026.177940

Authors: Chaeeun Lee, Woojin Kang, Seongho Park, Won Bo Lee, Jonggeol Na

Institutions: Seoul National University, Samsung (South Korea), Samsung Electronics (South Korea), Ewha Womans University

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Research Foundation of Korea, National Research Council of Science and Technology, Ministry of Science and ICT, South Korea, Samsung

Awards: G3584236952, G7793553699, G809632853

OpenAlex ID: W7163174638

FWCI:

Cites: 52

Cited by:

Related to: 10