Work

Achieving Up To 10 µm epitaxial AlN films on none heated composite substrates using DC magnetron sputtering

Year: 2026

Type: article

Source: Surfaces and Interfaces

DOI: 10.1016/j.surfin.2026.109737

Authors: R. Zernadji, B. Riah, S. Meddour, R. Beldjedra, B. Garnier, A. Ayad, B.E. Belkerk, M.A. Djouadi

Institutions: Centre National de la Recherche Scientifique, University of Biskra, Institut des Matériaux Jean Rouxel, Nantes Université, University Frères Mentouri Constantine 1, École Nationale Supérieure d'Hydraulique, Laboratoire de Thermique et Energie de Nantes, University of Constantine 3

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: green

Funders: Agence Nationale de la Recherche, Centre National de la Recherche Scientifique, Université de Nantes

Award: Mastering machininG usIng Multiple MicroSensors

OpenAlex ID: W7163220221

FWCI: 3.088

Cites: 53

Cited by: 2

Related to: 10