Year: 2026
Type: article
Abstract: Radiofrequency microelectromechanical systems (RF MEMS) integrated with metasurfaces are promising platforms for spectrally selective infrared (IR) sensing. Conventional devices detect IR radiation by tracking resonance frequency shifts. Here, we introduce a reflectometric approach that instead monitors changes in the RF MEMS input impedance and analytically links them to sensing metrics. By coupling a reconfigurable matching network to an RF MEMS resonator, the detector achieves IR responsivities governed by its phase-slope quality factor and tunable to exceptionally high values. Using contour-mode resonators at ambient conditions, we demonstrate responsivities exceeding 11,400 V/W in a 50-Ω readout (>200 A/W), spectral selectivity with a full-width at half-maximum (FWHM) of 0.54 μm at 5.94 μm, noise-equivalent power (NEP) of $$\sim 450\ {{{\rm{pW}}}}/\sqrt{{{{\rm{Hz}}}}}$$ ~ 450 pW / Hz , a ~ 552-μs time constant, and resolve IR power levels down to ~ 740 pW. Reflectometric RF MEMS detectors provide a reconfigurable, spectrally selective, and scalable platform for high-performance on-chip IR spectroscopy and sensing.
Source: Nature Communications
Authors: Melisa E. Gülseren, Matthew Benson, Zhixing Lin, Tianyou Li, William P. Putnam, J. Sebastian Gomez-Diaz
Institution: University of California, Davis
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: gold
Estimated APC paid: $6,990
OpenAlex ID: W7164947730
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