Work

Performance of AI agents based on reasoning language models on ALD process optimization tasks

Year: 2026

Type: article

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/6.0005313

Author: Angel Yanguas-Gil

Institution: Argonne National Laboratory

Language: English

Topic: Machine Learning in Materials Science

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funder: Argonne National Laboratory

Award: G107546177

OpenAlex ID: W7165775159

FWCI: 1.447

Cites: 19

Cited by: 1

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