Work

Fabrication of sub-wavelength-sized buried structures in silicon with single picosecond pulses from IR-laser system

Year: 2026

Type: article

Abstract: We demonstrate effective control of the shape and depth of sub-wavelength sized modifications in bulk silicon inscribed by transverse ultrafast single-shot laser pulses of 5 ps at 2.09 μm. A balance of multi-photon absorption and Kerr effect makes it possible to create the modifications with dimensions as small as 0.7 μm × 1.1 μm in the wide range of sub-surface depths. This approach was used for inscription of 9.8-mm long depressed cladding waveguides as a most common 3D structure. Waveguide properties were analyzed at 1.55 μm. The lowest propagation losses and the highest negative refractive index contrast were measured to be 1.8 dB/cm and 2.1 × 10 −3 respectively.

Source: Optics & Laser Technology

DOI: 10.1016/j.optlastec.2026.115974

Authors: Maksim Demesh, Nikolai Tolstik, Evgeni Sorokin, Irina T. Sorokina

Institutions: Norwegian University of Science and Technology, TU Wien

Language: English

Topic: Laser Material Processing Techniques

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: hybrid

Estimated APC paid: $3,230

Funders: American Theological Library Association, Norges Forskningsråd