Work

Tuning Aluminum Precursors for Area-Selective Infiltration into Polymers for High-Precision Pattern Transfer

Year: 2026

Type: article

Source: ACS Applied Materials & Interfaces

DOI: 10.1021/acsami.6c05488

Authors: Maggy Harake, Yujin Lee, Beihang Yu, Giulio D’Acunto, Scott Dhuey, Ricardo Ruiz, Stacey F. Bent

Institutions: Stanford University, Lawrence Berkeley National Laboratory

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Knut och Alice Wallenbergs Stiftelse, Energy Frontier Research Centers

Awards: G4520758489, G5707437273

OpenAlex ID: W7168500090

FWCI:

Cites: 60

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