Study on the Identification of Wavy Features of Si3N4 Wafer Microdamage With Improved K‐Means Clustering by Incorporating the Centroid Growth Mechanism
Year: 2026
Type: article
Source: Advanced Engineering Materials
Institution: Aero Engine Corporation of China (China)
Language: English
Subfield: Industrial and Manufacturing Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Award: 基于CFD-DEM耦合方法的氮化硅粉体干法制备机理研究
OpenAlex ID: W7169158760