Work

Modulation of microstructure, nanomechanical property and diffusion barrier performance in NbMoTaWNx high entropy nitride thin films by adjusting nitrogen content

Year: 2026

Type: preprint

Source: SSRN Electronic Journal

DOI: 10.2139/ssrn.7158193

Authors: Yahui Liu, Linbo Lv, Shenghao Liu, S.Q. Ding, D.X. Zhang, J. Z. Jiang, X.D. Wang, Qingping Cao

Language: English

Topic: Copper Interconnects and Reliability

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: green

OpenAlex ID: W7170064363

Cites: 45

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Related to: 10