Work

Sezawa-Mode Surface Acoustic Wave Resonators in Pulsed-Laser-Deposited Pb0.9Ba0.1(Zr0.52,Ti0.48)O3 on Bulk Silicon

Year: 2026

Type: article

Abstract: Barium-doped Lead Zirconate Titanate Pb0.9Ba0.1(Zr0.53Ti0.47)O3 films with a (001)-dominant orientation were deposited on bulk silicon (Si) substrates using pulsed laser deposition (PLD). Due to the large electromechanical coupling coefficient (K2) of the P(B)ZT layer and the larger shear modulus of the Si substrate compared to the P(B)ZT film, it is possible to obtain higher-order acoustic-resonant modes (Sezawa mode) with SAW wavelength (λ)–piezoelectric film thickness (h) ratios below h/λ < 0.2. Due to the ferroelectric properties of the P(B)ZT film, the resonator’s performance can be improved by increasing the electric polarization. Consequently, the measured quality (Q) factors can be improved from 50 to 200 and the K2 values can be improved from 2 to 5% with the resonance frequency ranging from 275 to 500 MHz.

Source: Micromachines

DOI: 10.3390/mi17070868

Authors: Yves Janssens, Erwin Berenschot, Minh Nguyen, Niels Tas

Institution: University of Twente

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: gold

Estimated APC paid: $2,534

Funders: University of Twente, Nederlandse Organisatie voor Wetenschappelijk Onderzoek