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PRISM: Photonics-Informed Inverse Lithography for Manufacturable Inverse-Designed Photonic Integrated Circuits

Year: 2026

Type: article

Source: ACM Transactions on Design Automation of Electronic Systems

DOI: 10.1145/3831710

Authors: Hongjian Zhou, Haoyu Yang, Nicholas Gangi, Tianle Xu, Rena Huang, Jiaqi Gu

Institutions: Arizona State University, Nvidia (United States), Rensselaer Polytechnic Institute

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W7170141139

FWCI:

Cites: 14

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