Work

Precision plasma sterilization system integrating machine vision and Z-axis closed-loop distance control

Year: 2026

Type: article

Source: Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

DOI: 10.1116/6.0005538

Authors: Le Dong, Shuang-Long Wang, Zheng-Yan Chen, Hui-Juan Lu, Guang-Xiu Peng, Xiao-Qiong Wang, Xiao-Xia Du, Hua Li

Institution: Guilin University of Electronic Technology

Language: English

Topic: Plasma Applications and Diagnostics

Subfield: Radiology, Nuclear Medicine and Imaging

Field: Medicine

Domain: Health Sciences

Open Access status: closed

Funders: Natural Science Foundation of Guangxi Zhuang Autonomous Region, National Natural Science Foundation of China, Guilin University of Electronic Technology, National College Students Innovation and Entrepreneurship Training Program

Awards: G1833406828, G2428820607, G6375181507, G8561113484

OpenAlex ID: W7171406291

FWCI:

Cites: 15

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