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Oxygen vacancy engineering for BEOL-compatible thickness-scaled Hafnia ferroelectrics

Year: 2026

Type: article

Source: Nanotechnology

DOI: 10.1088/1361-6528/ae93c4

Authors: Xueyang Peng, Pengfei Jiang, Yang Yang, Pan Xu, Qianqian Wei, Yu Song, Qingyi Yan, Wei Wei, Tiancheng Gong, Yuan Wang, Xiao Long, Qing Luo

Institutions: Chinese Academy of Sciences, University of Chinese Academy of Sciences

Language: English

Topic: Ferroelectric and Negative Capacitance Devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: China Association for Science and Technology, National Natural Science Foundation of China, Youth Innovation Promotion Association of the Chinese Academy of Sciences

Awards: G1773702449, G2676286910, G6800275950

OpenAlex ID: W7172289681

FWCI:

Cites: 28

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