Preparation of a Ta2O5–SiO2 composite bilayer using electron beam evaporation for the surface passivation of In0.83Ga0.17As PIN photodetectors
Year: 2026
Type: article
Source: Applied Physics Letters
DOI: 10.1063/5.0345391
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Awards: G3697265971, G5795055248
OpenAlex ID: W7203620636
