Enhanced Responsivity of β-Ga2O3-Based Solar-Blind Ultraviolet Photodetectors via Inductively Coupled CF4 Plasma Treatment
Year: 2026
Type: article
Language: English
Topic: Ga2O3 and related materials
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
Awards: G2286006201, G4204133604
OpenAlex ID: W7203760515
