Implementation of Heterodyne-Detected Tapping-Mode Photothermal Atomic Force Microscopy–Infrared Spectroscopy for Semiconductor Materials and Devices
Year: 2026
Type: article
DOI: 10.3791/71517
Institution: Boise State University
Language: English
Subfield: Atomic and Molecular Physics, and Optics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W7203879814
