Year: 2026
Type: article
Abstract: This work presents a LiNbO 3 laterally excited bulk acoustic resonator (XBAR) with staggered diamond-hole interdigital transducers (IDTs) for suppressing higher-order A1-n spurious modes. By introducing multidirectional acoustic scattering and disrupting lateral periodicity, the proposed structure weakens the coherent buildup of lateral standing waves while preserving the target A1 mode. Comparative analysis of conventional, parallel, and staggered electrode configurations shows that the staggered layout provides a better balance between spurious suppression and main-mode preservation. Devices fabricated on 400 nm-thick Z-cut LiNbO 3 thin films operate at 4.57 GHz, exhibiting a Bode- Q max of 527 and an electromechanical coupling coefficient ( k t 2 ) of 22.2 %, corresponding to a figure of merit ( FOM = k t 2 × Q ) of 117. Compared with the conventional design, the spurious mode level is reduced from 0.588 to 0.285. The proposed structure provides a practical route toward high-frequency, low-loss LiNbO 3 acoustic resonators.
Authors: Pengyi Wang, Qiang Xu, Yong Li, Shitao Lv, Qiner Xu, Yi Cao, Taili Bai, Tengfei Xu, Jicong Zhao
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: gold
Estimated APC paid: $1,800
OpenAlex ID: W7203896782