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Stability of sub-10 nm atomic layer-deposited alumina thin films on gold electrode surfaces in aqueous electrolytes

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Year: 2026
Type: article
Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
DOI: 10.1116/6.0005555
Authors: Dorian Thompson, Saidjafarzoda Ilhom, Fatih Bayansal, Steven Allaby, Xinhao Wang, Yangchao Luo, Necmi Biyikli, Yu Lei
Institution: University of Connecticut
Language: English

Topic: Semiconductor materials and devices
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences

Open Access status: closed

Funder: National Science Foundation
Award: Atomic Layer Deposition Enabled Perfluorinated Ligand Imprinted Molecular Layer Sensor for Total PFAS Detection
OpenAlex ID: W7204074202
FWCI:
Cites: 30
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