Work

Laboratory technology of micromanipulation using micropincers with shape memory effect to create suspended microstructures based on whiskers of functional materials

Year: 2026

Type: article

Abstract: A technology for manipulating whisker-like single crystals (whiskers) of quasi-one-dimensional charge-density-wave (Q1D CDW) semiconductors was developed for the fabrication of suspended structures. A current-controlled microgripper based on shape memory alloy (SMA) composite ribbons was created. A technique for capturing and fixing whiskers using a micromanipulator and a tungsten probe was developed, together with a method for contact formation employing a mask transferred by the microgripper followed by metal deposition. Resonant modes of high-frequency electromechanical oscillations in a suspended TaS₃ whisker were detected and investigated using the heterodyne method.

Source: Journal of Radio Electronics

DOI: 10.30898/1684-1719.2026.7.11

Authors: S.R. Romanov, V.V. Koledov, M.V. Nikitin, A.P. Orlov, V.Ya. Pokrovsky, A.V. Shelyakov, D.A. Khachatryan, A.V. Kletsov, A.K. Pogorelov

Institutions: Kotelnikov Institute of Radioengineering and Electronics of the Russian Academy of Sciences, National Research Nuclear University MEPhI

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: diamond

OpenAlex ID: W7204087144

FWCI:

Cites:

Cited by:

Related to: 10