An Electrostatic Servo MEMS Capacitance Diaphragm Gauge
Year: 2026
Type: preprint
Source: SSRN Electronic Journal
DOI: 10.2139/ssrn.7354954
Authors: SuiHui Wang, Gang Li, Xiaodong Han, Yang Zhou, Yuanhua Xie, Kun Liu, Detian Li
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W7204278366