Work

Gas-phase surface functionalization of plasma-deposited amorphous silicon and silicon nitride surfaces with aldehydes

Year: 2026

Type: article

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/6.0005652

Authors: Andrew P. Kaye, Marnix C. van Gurp, Xinjian Lei, Ronald M. Pearlstein, Haripin Chandra, Agnes Derecskei-Kovacs, Bhushan Zopé, Sumit Agarwal

Institutions: Colorado School of Mines, Eindhoven University of Technology, Intermolecular (United States)

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7204477405

FWCI:

Cites: 62

Cited by:

Related to: