Work

Predicting moisture outgassing dynamics of vacuum materials from temperature-programmed desorption energy distributions

Year: 2026

Type: article

Source: Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

DOI: 10.1116/6.0005715

Authors: Graham Reitz, Oleksandr Polonskyi, Michael Gordon

Institution: University of California, Santa Barbara

Language: English

Topic: Adsorption, diffusion, and thermodynamic properties of materials

Subfield: Spectroscopy

Field: Chemistry

Domain: Physical Sciences

Open Access status: closed

Funder: National Science Foundation

OpenAlex ID: W7204561867

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Cites: 24

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