Scalable, Simple, and Versatile Encapsulation of 2D Materials and Devices

Year: 2026

Type: article

Abstract: Air-sensitive 2D materials present fundamental challenges for device integration. Encapsulation is required to preserve intrinsic properties, yet conventional strategies require complicated fabrication workflows and fail with thicker flakes. We demonstrate that electron-beam (e-beam) evaporated aluminum oxide (AlOx) serves as an effective encapsulation layer and sacrificial fabrication mask, protecting sensitive flakes from air, photoresists, and chemicals. Unlike transfer-based approaches, this scalable technique requires no stacking and enables contacts without postencapsulation etching or harsh chemistry. Using rare-earth tritellurides (RTe3, R = La, Er), semimetallic WTe2, and superconducting FeTexSe1–x, we show that AlOx suppresses oxidation and preserves optical and electronic properties. We establish substrate-dependent optimization of encapsulation across a range of flake thicknesses, demonstrate that ultrathin AlOx preserves WTe2’s plasmonic response, and enhances superconducting performance in FeTexSe1–x devices when employed as a mask. Thus, we overcome the longstanding trade-off between encapsulation and straightforward device fabrication in fragile quantum materials.

Source: Nano Letters

DOI: 10.1021/acs.nanolett.6c03297

Authors: Gabriel Natale, Uma Chirkova, Flávio Henriques Feres, Ran Jing, Michael Geiwitz, Wenyao Liu, Emma Low, Josh Leeman, Kyung-Mo Kim, Leslie M. Schoop, Mohamed Shehabeldin, Qiong Ma, Michael A. Susner, Pijush Bhattacharya, Genda Gu, Katherine Lee, James Hone, Mengkun Liu, Kenneth S. Burch

Institutions: Boston College, Brazilian Center for Research in Energy and Materials, Stony Brook University, Princeton University, United States Air Force Research Laboratory, Azimuth (United States), Brookhaven National Laboratory, Brookhaven College, Columbia University

Language: English

Topic: 2D Materials and Applications

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: hybrid

Estimated APC paid: $4,500

Funders: National Science Foundation, U.S. Department of Energy, Gordon and Betty Moore Foundation, Boston College, Fundação de Amparo à Pesquisa do Estado de São Paulo, Office of Science, Materials Research Science and Engineering Center, Harvard University, Division of Materials Research, Basic Energy Sciences, Air Force Office of Scientific Research

OpenAlex ID: W7204596384