Work

AFM tip-based nanomanufacturing: Update on the research progress over the past decade

Year: 2026

Type: article

Source: International Journal of Machine Tools and Manufacture

DOI: 10.1016/j.ijmachtools.2026.104445

Authors: Kuangbing Wang, Donglei Yan, Zhan Li, Guangrui Zhao, Yunli Gao, Bingrui Lv, Yongda Yan, Yanquan Geng

Institutions: Harbin Institute of Technology, State Key Laboratory of Robotics and Systems

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Awards: G4038866301, G7166488905

OpenAlex ID: W7204599611

FWCI:

Cites: 154

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