Work

High-Throughput full-spectrum characterization of semiconductor thin films via AD-accelerated physics-informed inversion: Demonstrations in Si and SiC epitaxy

Year: 2026

Type: article

Source: Journal of Alloys and Compounds

DOI: 10.1016/j.jallcom.2026.190602

Authors: Zhentao Li, Xiang Zhong, Jing Zhong, Xinge Liu

Institutions: Central South University, Xinjiang Production and Construction Corps, Xinjiang University of Technology

Language: English

Topic: Spectroscopy and Chemometric Analyses

Subfield: Analytical Chemistry

Field: Chemistry

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Award: G3063801042

OpenAlex ID: W7204604895

FWCI:

Cites: 21

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