Electrophoresis-driven agglomeration enables filtration-based removal of sub-100 nm silica nanoparticles from semiconductor industry-grade processing chemicals
Year: 2026
Type: article
Source: Nanoscale
DOI: 10.1039/d6nr02390h
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Awards: G2865555180, G6237848795, G9000363393
OpenAlex ID: W7206177308
