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How to Manufacture the Impossible: The Secrets of Process Integration for Hyper‐scaled MOSFET Products

Year: 2026

Type: book-chapter

Source: Wiley eBooks

DOI: 10.1002/9781394406517.ch13

Author: Kelin J. Kuhn

Institution: Cornell University

Language: English

Topic: Advancements in Semiconductor Devices and Circuit Design

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W7208790913

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