Year: 2023
Type: article
Abstract: A description is given of flow velocity sensors for continuous media based on silicon with nanoclusters of nickel atoms, which possess high sensitivity and stability of output parameters. The mode of nickel diffusion into silicon for creating a flow velocity sensor of continuous media is considered. The electrophysical parameters of the sensor have been investigated.
Author: Маннанов М.И.
Institution: National University of Uzbekistan
Language: English
Subfield: Mechanics of Materials
Field: Engineering
Domain: Physical Sciences
Open Access status: diamond
OpenAlex ID: W7210262290