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More is not always better: Dissociative photoionization limits the EUV absorbing photoacid generator pentafluorophenyl triflate in photolithography

Year: 2026

Type: article

Abstract: Pentafluorophenyl triflate has been explored as a highly absorbing neutral photoacid generator (PAG) candidate for next-generation chemically amplified resists used in extreme ultraviolet (EUV) lithography. Although increased fluorination enhances EUV absorption, this study demonstrates that such an approach does not necessarily improve photoacid generation efficiency. Using photoelectron-photoion coincidence spectroscopy at the 92 eV photon energy of the EUV scanners in combination with quantum-chemical calculations, the dissociative photoionization of pentafluorophenyl triflate was systematically investigated. The photoionization mass spectrum reveals extensive fragmentation, with the parent ion contributing only 3.1% of the total signal and CF3+ representing the dominant product ion. Computed appearance energies align well with experimental trends and support a sequential fragmentation pathway involving loss of SO2, CF3, and CO. Crucially, none of the major dissociation channels yield precursors capable of forming triflic acid, the strong photoacid required for efficient deprotection reactions in chemically amplified resists. Combined with previous dissociative electron attachment studies indicating similarly unfavorable fragmentation, the results demonstrate that despite its high EUV absorption cross section, pentafluorophenyl triflate is unsuitable as a PAG for EUV lithography. The findings highlight the importance of understanding fundamental photoionization and electron-interaction mechanisms to guide the rational design of next-generation high-performance EUV photoresists.

Source: The Journal of Chemical Physics

DOI: 10.1063/5.0349498

Authors: Fabian Holzmeier, Michiel J. van Setten, Ragnar Björnsson, Robert Richter, Filipe Ferreira da Silva, Oddur Ingólfsson