IS 4.2 - microGauge – a Micro Resonator Gauge (MRG) Featuring a High-Stability Zero for Vacuum Process Control
Year: 2026
Type: conference-paper
Abstract: VAT has developed a micro resonator-based pressure sensor enabling high zero-stability.This is achieved by designing a resonator featuring a high-aspect-ratio gap and driving it in a closed loop configuration in order to use the resulting squeeze-film damping as a measure for the pressure.Additionally, a thermo-mechanical decoupling of the MEMS transducer is minimizing environmental disturbances.A zero stability below 10 -2 mTorr is being demonstrated over a period of nine months, offering the means to ensure repeatable control in vacuum processing applications for semiconductor manufacturing.
Source: Lectures
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: diamond
OpenAlex ID: W7220444320