Synthesis of Large-area Two-Dimension Metal-Organic Framework Films via Chemical Vapour Deposition
Year: 2026
Type: preprint
Abstract: Synthesizing uniform and large-are two-dimensional (2D) metal-organic framework (MOF) films directly on substrates is highly desirable and important for MOF-based electronics, but it still remains great challenge. Here, a simple chemical vapour deposition (CVD) growth strategy with controllable-thickness and large-area capabilities has been developed to directly prepare them on substrates, in which 2,3,6,7,10,11-hexahydroxytriphenylene (HHTP) ligand films pre-deposited on substrates react with copper (II) acetylacetonate (Cu(acac) 2 ) vapor, resulting the structure transformation from small molecule thin film to Cu 3 (HHTP) 2 MOF films. The MOF films have high crystalline quality with uniform surface, large area (4 inches wafer) and controllable thickness (15 nm to 100 nm). And Replacing Cu(acac) 2 with nickel (II) acetylacetonate (Ni(acac) 2 ) and platinum (II) acetylacetonate (Pt(acac) 2 ) as metal ion source, the method can also be used to synthesize uniform Ni 3 (HHTP) 2 and Pt 3 (HHTP) 2 MOF films, suggesting the generic applicability of this method. When employed the Cu 3 (HHTP) 2 MOF films as an active material for optoelectronic devices, it simulates light-stimulated and synaptic memory properties, making it exhibit promising application in artificial biological synapse.
Source: ChemRxiv
Authors: Jinzhi Zhang, Runkun Li
Language: English
Subfield: Inorganic Chemistry
Field: Chemistry
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W7221545537