Work

Monolithically integrated four-channel optoelectronic wind sensor with a mushroom-shaped sensitive structure

Year: 2026

Type: article

Abstract: This paper presents a novel wind sensor based on a monolithically integrated four-channel optoelectronic chip and a mushroom-shaped sensitive structure. The four-channel optoelectronic chip consists of a centrally positioned light-emitting diode (LED) surrounded by four symmetrically arranged photodetectors (PDs). By employing monolithic integrated manufacturing technology, the consistency among the four PDs is significantly enhanced, thereby ensuring the overall symmetry of the sensor. In addition, an environmentally robust mushroom-shaped wind-sensitive structure is designed to interact with airflow while packaging the optoelectronic chip, providing reliable protection against outdoor environmental conditions. The manufactured sensor is subsequently installed in a wind tunnel for a series of measurements. The results demonstrate the capability of the sensor to monitor wind speeds ranging from 0 to 18 m/s and wind direction from 0 to 360°. This innovative design paves the way for advancements in wind-sensing devices, positioning it as a promising candidate for practical applications across various fields.

Source: Microsystems & Nanoengineering

DOI: 10.1038/s41378-026-01441-8